Micro-electromechanical System (MEMS) Laboratory
The Micro-electromechanical Systems (MEMS)
laboratory, supervised by Professor Qu, was established recently to pursue
advanced research in MEMS and Nano-electromechanical Systems (NEMS). It has a
fume hood and wet chemical etch setup for MEMS device fabrication preparation,
and also houses workstations equipped with COMSOL, Mentor Graphics, and other
software. Most fabrication processes are carried out at the Michigan
Nanofabrication Facility. The lab is
equipped with mechanical and optical characterization tools for MEMS devices,
including a precision rotary table, an electromagnetic shaker, a laser
vibrometer and other instruments.